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Spare Parts
Parts Refurbishment
Heater & E-chuck
Meidensha Power Quality Solutions
Meidensha UPS
Meidensha Vacuum Capacitors
Meidensha Inverter
Meidensha AGV
Meidensha Ceramic Membrane
Solar system
Burn-in & Test system
Lithium-ion battery
Automatic Guided Vehicle (AGV)
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Upper Electrode/Bottom Cathode (4.5G)
TEL-203130-11
Shower Plate (4.5G)
依各代數型號不同
Process Kit (4.5G~7.5G)
依各代數型號不同
Diffuser Frame (4.5G~7.5G)
依各代數型號不同
Shadow Frame (3.5G~7.5G)
依各代數型號不同
Diffuser (3.5G~7.5G)
依各代數型號不同
Susceptor (3.5G~7.5G)
ETCH / 8" Super E 機台/ETCH / 12" E-Mas 機台
Slit Door
ETCH / 8" Super E 機台/ETCH / 12" E-Mas 機台
DGDP
ETCH / 8" Super E 機台/ETCH / 12" E-Mas 機台
Cathode Liner
ETCH / 8" Super E 機台/ETCH / 12" E-Mas 機台
Chamber Liner
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